Edition 03/15

Negative pressure from up to 500 mbar (300 mbar abs.) can already be achieved with one stage. This is possible thanks to the AERZEN positive displacement blowers of series Delta Blower G5, or the newly developed rotary lobe compressors of series Delta Hybrid. A vacuum pumping set is mandatory for pressures below 300 mbar abs., and here a backing pump and a vacuum positive displacement blower are combined. The blower and the pump together generate, in two stages, the necessary vacuum. As a pioneer and specialist with years of experience, AERZEN gives advice to manufacturers of such backing pumps in terms of choosing the optimum backing pump, and selects the appropriate AERZEN vacuum positive displacement blower. Both systems need to be coordinated both in terms of their power requirements, and thermally, in an optimal way, so that the required parameters can be fulfilled. Economical and energy-efficient operation of the plant is thus guaranteed.

Series mHV with pre-inlet cooling

For the vacuum range from 300 to 10 mbar, the vacuum blowers with pre-inlet cooling of series mHV are appropriate. AERZEN supplies these solutions in eleven sizes for theoretical nominal intake volume flows from 250 to 61,000 m³/h. The maximum allowed differential pressure depends on the thermal load. Pre-inlet blowers are mainly used in rough vacuum and negative pressure range as backing pump or negative pressure stage against atmosphere, in order to achieve high differential pressures in one stage. Also for high compression ratios in rough vacuum up to p2/p1 = 5, these blowers are the right choice. Pre-inlet blowers of series mHV guarantee continuous operation without overheating problems.

Air-cooled series

HV The air-cooled blowers of series HV are designed for the fine vacuum range from 200 to 10-3 mbar. AERZEN supplies these solutions in eleven sizes for theoretical nominal intake volume flows from 180 to 97,000 m³/h and support speeds from 3,000 to 3,600 rpm. They work either with vertical direction of flow (type of construction: GM) or with horizontal direction of flow (type of construction: GL). The horizontal direction of flow allows a particularly compact type of construction. Both types of construction are used in the coating process, in chemical and process engineering and process engineering, in the metallurgy and packing industries, in central vacuum plants, in helium compression and helium leak detection systems, in the manufacturing of lamps, tubes, solar equipment and in the automotive industry. For particular applications, special seals can be used for air-cooled, splash lubricated blowers. Special variants of material, e.g. for housing parts and rotary pistons, can also be used.

Series CM and HM for continuous operation

The AERZEN canned motor blowers of series CM and HM have been designed for 24-hour operation. They are certified for ATEX zone 0 and cover the entire high-vacuum range from 200 to 10-5 mbar. For lubrication, mineral oil or Fomblin oil are to be used. Series CM for aggressive gases is available in 14 sizes for theoretical nominal intake volume flows from 110 to 15,340 m³/h. Series HM for neutral gases is available in 9 sizes for theoretical nominal intake volume flows from 406 to 15,570 m³/h. These systems are appropriate for the production of an industrial vacuum, for example in chemical and process engineering and process engineering, in foil and glass coating, evacuation of hydrogen, in helium leak detection systems and in any situations where leakages must be avoided. In addition, these blowers have proven to be a great success in the semiconductor industry, in microelectronics, in the manufacture of flat screens, in laser technology and in solar technology. The canned motor blowers can deliver in both directions - vertical and horizontal. The series water cooling of the motors allows operation under clean room conditions. An excellent mechanical resistance (up to 230 mbar) reduces the pumping times considerably. The application of a frequency converter makes a high control range (1:5) possible, and therefore, smaller blower sizes can also be used. Thanks to different motor variants for network, cyclical and continuous operations, an individual solution can always be found, even for special applications. AERZEN can offer an appropriate product for every situation.